The integration of two existing reference metrology axes of an XY precise positioning stage

advice as to how you should progress your project. It is expected that the project includes a literature review. You should begin by writing this review. All information included in the review should be properly referenced. Your review will probably include; a description of the state the art of precision positioning systems; the control of piezo actuated systems; a discussion of metrology (measuring) issues; identification of possible errors associated with interferometers and how these may be mitigated through design or coding (programming)

also , Michelson interferometers , How they are used to measure movement , Piezo actuators ( stackri ) ,, p.I.

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